Search This Blog

Tuesday, November 26, 2013

Friday, November 22, 2013

Agilent 81130A Pulse Data Generator Review of Features

Glitch-free timing changes 
Now you can sweep your timing values without the danger of spurious pulses or dropouts that could cause measurement errors.  (Applies to continuous mode,  values < 100 ms, consecutive  values between 0.5 and twice the  previous value on the 81101A,81104A, 81110A)

Reliable measurements
All models provide clean,  accurate pulses with excellent repeatability, thus contributing to measurement integrity. The Agilent 81110A features self- calibration for more accuracy. It also offers a choice of output modules: the Agilent 81111A 165 MHz, 10 V module with variable transitions and the Agilent 81112A 330 MHz, 3.8 V module which has differential outputs and two selectable transition times. The Agilent 81130A offers a choice of output modules: the Agilent 81131A 400 MHz, 3.8 V module and the Agilent 81132A 660 MHz, 2.5 V module which has complementary outputs.

AD:  Low prices on Sales and Repairs of Agilent 81130A, 81131A and 81132A at BRL Test

Features such as the clear graphical display, autoset, help, store/recall, preset TTL/ECL levels, selectable units (such as current/voltage, width/duty-cycle), and load compensation ensure a high level of convenience. Smooth integration into automated test systems The Agilent 81100A family can be integrated easily into all phases of test system development. Test  programs are 100% upwardly compatible from the Agilent 81101A to the 81104A and from the 81104A to the 81110A, ensuring that growth with future needs is as easy as just exchanging the instruments physically. This results in low integration costs, in addition to low costs of ownership through proven hardware reliability. Emulate the device's  environment...Today's devices can require very  complex stimuli. To meet this, the Agilent 81130A can sequence and loop its memory for very deep patterns. RZ (return-to-zero), NRZ (non-return-to- zero) and R1 (return-to-one) formats are available. Digital channel addition allows the generation of signals with two different pulse widths and delays or of data rates up to 1.32 Gbit/s in one single channel.

Frequency range 
 Agilent 81130A is designed and recommended for an operation in the frequency range of 170 kHz to 400/660 MHz. However it can be operated in the extended range down to 1 kHz.

Tuesday, November 12, 2013

N9010A Agilent Signal Analyzer at BRL Test - Sales and Repairs

N9010A Agilent Signal Analyzer at BRL Test - Sales and Repairs. The N9010A sports 30-ms mode switching, and moves more data or results in less time with the 1000Base-T LAN connection. BRL Test is your headquarters for premium used Agilent Spectrum Analyzers. Save big yet rest easy with a full warranty backed up by the best techs in the business. BRL test's repair lab is World Class!  Wouldn't you like a friend like that on your side?

Call your BRL Test representative today to see if the N9010A is the right analyzer for you 866.275.8378
Click here for N9010A data sheet.

Monday, November 11, 2013

Parametric Testing / Scribeline Probing / Agilent 4073

From Ira Feldman's blog

IEEE Semiconductor Wafer Test Workshop – Parametric / Scribeline Probing – Session Six (Tuesday)
Here are the highlights from Session Five – Signal Integrity of the 20th annual IEEE Semiconductor Wafer Test Workshop (SWTW) from Tuesday June 8th.

Jay Thomas, Grund Technical Solutions, LLC., “Probe Cards with Modular Integrated Switching Matrices”:

For the last 30 years, most scribeline parametric testing has been approximately 85% Current-Voltage (I-V) testing and 15% Capacitance-Voltage (C-V) testing. For these types of tests a 10 MHz bandwidth switch matrix has been sufficient.

However, some of the larger fabs such as HP, IBM, and Intel have started performing pulsed Current-Voltage (PIV) and electrostatic discharge (ESD) testing. These customers started this type of testing about four years ago unknown to Agilent & Keithley (the two largest DC parametric tester suppliers). This PIV and ESD testing requires high frequency switch matrices with 1 GHz bandwidth. [For more about ESD testing please see Jay’s second presentation below in this session.]

In addition as oxides have become very thin this has made them “leaky”, therefore there is also a need to run higher frequency measurements. Typically the matrix switch needs to be 5x to 10x the bandwidth of the desired test frequency. This is also driving the need for higher bandwidth matrix switches.

Grund has developed a modular stack of a mother board with daughter cards to provide a 1 GHz matrix switch called the Genus matrix system. This stack of printed circuit boards (PCB) sits above the probe card on the prober and provides the necessary high frequency interconnect to the parametric tester and other equipment (ESD source, oscilloscope, etc.).

Ray Robertazzi, IBM Research, “New Directions in Parametric and Defect Structure Testing”:

As feature sizes shrink at the 22 nm process node and below, the variability in basic process measurements increases. Therefore they need to rely on statistical methods instead of a single pass / fail measurement. These statistical methods require a significant numbers of measurements to be valid. However the linear increase in test time due to the additional measurements is unacceptable.

What is needed is the ability to perform a large number of parametric measurements in parallel. The DC parametric testers currently used have the required sensitivity to make measurements in below 1 pA however on only one or two channels. While typical high parallelism logic testers which have thousands of channels that can operate in parallel don’t have the accuracy to measure below 10 nA (i.e. they are four orders of magnitude worse than the parametric testers).

Therefore, Verigy developed a pA source measurement unit (SMU) for their 93000 test system. The Verigy team led by Kosuke Miyao developed a fully integrated solution to provide 100 channels to perform measurements in the 5 pA range. [Kosuke was one of the excellent project managers on the Docking Services team I managed at Agilent. Kosuke: it is always a pleasure to hear a customer gush about how happy they are at the end of a project.] In addition to the SMU, the solution included high parallelism parametric probe cards from JEM, a new low leakage tri-axial pogo tower, and integrated control software.

However, modern test systems suffer from the lack of ability to observe or validate results. In Ray’s opinion test systems are the most complex electromechanical systems every developed by man. IBM under estimated how difficult the validation portion of the project would be. The Verigy validation load board (VLB) was designed to calibrate the SMU in the test system and had no observability for external validation. So in order to validate the test system setup they built a pA diagnostic instrument which allows correlation with a HP 4073 parametric tester and provides National Institute of Standards and Technology (NIST) traceability.

After validating the solution, the system was release to production. In production it has demonstrated a 5x throughput improvement due to the high parallelism in testing and is currently limited by the prober speed.

Jay Thomas, Grund Technical Solutions, LLC., “Wafer Level ESD Probe Card Solutions”:

Production testing of electrostatic discharge (ESD) test structures is a new market. In the past, ESD testing was previously done off line using a manual probe system. Neither Agilent (where he managed parametric testing applications) nor Keithley (to the best of his knowledge) support this in an automated fashion.

The traditional Human Body Model (HBM) provides a high voltage 2 A pulse with a 500 nS decay by discharging a 100 pF capacitor with a 1500 Ohm resistor. [Similar to the shock from running your feet across the carpet then touching another object.] However, the new European standard (required for CE marking) is the Human Metal Model (HMM). The HMM combines the HBM with a Charged Device Model (CDM) to simulate the discharge that might occur from holding an insulated screw driver. His presentation has scanning electron microscope (SEM) images of the different types of damage that is seen based upon the discharge model used.

Companies put ESD test structures in the scribe lines to predict how well the ESD protection circuits will work. Typically the ESD discharge takes place “off line” on an ESD “tester” (actually a discharge setup typically on a manual prober). Then the wafer is put back in the wafer prober and the test structure is tested using a DC parametric tester. Similarly to test actual parts you need to zap the part on the ESD “tester” and then need to test the part with a standard digital/mixed-signal tester to see if it survived. One example shown was a Hanwa system for CDM (about $250K). However, it needs to zap the pins one at a time. And on a 3,000 pin ball grid array (BGA) that would take some time to accomplish.

Through the use of the Genus matrix system (described above in Jay’s first presentation), they are able to integrate ESD discharge equipment in to the parametric test setup. This allows the “zapping” of the test structure and testing of it in an automated fashion without moving the wafer to an offline setup.

Note: I will post the link for the slides once they become available.